愛媛大学電子物性デバイス工学講座半導体工学分野

白方研究室

Deposition of Metal Films

Resistive Heater Evaporator (Daiwa Vac.)

Resistive Heater Evaporator (Hitachi)

Electron Bonbardment Evaporator (Daiwa Vac. with Anelva E-gun)

DC Sputtering (ion corter)